Abstract: ATLAS is a multipurpose experiment that records the products of the LHC collisions. In order to reconstruct the trajectories of the charged particles produced in these collisions. ATLAS has an internal tracking system made of silicon planar sensors (pixels and micro-strips) and drift-tube based detectors; both together, they constitute the ATLAS Inner Detector. The alignment of the ATLAS tracking system requires the determination of their almost 36,000 degrees-of-freedom (DOF) with high accuracy. Thus, the demanded precision for the alignment of the pixel and micro-strip sensors is below 10 μm. As alignment algorithms are based on the minimization of the track-hit residuals, a linear system with a large number of DOF has to be solved. The alignment results of the ATLAS tracker using data recorded during cosmic commissioning phases in 2008 and 2009 and the LHC start up run in 2009 will be presented. Moreover recent 7 TeV data collected during 2010 run have been used to study the detector performance. These studies reveal that the detector is aligned with a precision high enough to cope with the requirements.