PT Journal AU ATLAS Collaboration (Aad, Gea Aparisi Pozo, JA Bailey, AJ Cabrera Urban, S Cardillo, F Castillo, FL Castillo Gimenez, V Costa, MJ Escobar, C Estrada Pastor, O Fiorini, L Fullana Torregrosa, E Fuster, J Garcia, C Garcia Navarro, JE Gonzalez de la Hoz, S Gonzalvo Rodriguez, GR Guerrero Rojas, JGR Higon-Rodriguez, E Lacasta, C Lozano Bahilo, JJ Mamuzic, J Marti-Garcia, S Martinez Agullo, P Miralles Lopez, M Mitsou, VA Moreno Llacer, M Navarro-Gonzalez, J Poveda, J Prades IbaƱez, A Rodriguez Bosca, S Ruiz-Martinez, A Sabatini, P Salt, J Sayago Galvan, I Soldevila, U Sanchez, J Torro Pastor, E Valero, A Valls Ferrer, JA Villaplana Perez, M Vos, M TI Measurements of sensor radiation damage in the ATLAS inner detector using leakage currents SO Journal of Instrumentation JI J. Instrum. PY 2021 BP P08025 - 46pp VL 16 IS 8 DI 10.1088/1748-0221/16/08/P08025 LA English DE Radiation damage to detector materials (solid state); Detector modelling and simulations I (interaction of radiation with matter; interaction of photons with matter; interaction of hadrons with matter; etc) AB Non-ionizing energy loss causes bulk damage to the silicon sensors of the ATLAS pixel and strip detectors. This damage has important implications for data-taking operations, charged-particle track reconstruction, detector simulations, and physics analysis. This paper presents simulations and measurements of the leakage current in the ATLAS pixel detector and semiconductor tracker as a function of location in the detector and time, using data collected in Run 1 (2010-2012) and Run 2 (2015-2018) of the Large Hadron Collider. The extracted fluence shows a much stronger vertical bar z vertical bar-dependence in the innermost layers than is seen in simulation. Furthermore, the overall fluence on the second innermost layer is significantly higher than in simulation, with better agreement in layers at higher radii. These measurements are important for validating the simulation models and can be used in part to justify safety factors for future detector designs and interventions. ER