%0 Journal Article %T Physical Limitations to the Spatial Resolution of Solid-State Detectors %A Boronat, M. %A Marinas, C. %A Frey, A. %A Garcia, I. %A Schwenker, B. %A Vos, M. %A Wilk, F. %J IEEE Transactions on Nuclear Science %D 2015 %V 62 %N 1 %I Ieee-Inst Electrical Electronics Engineers Inc %@ 0018-9499 %G English %F Boronat_etal2015 %O WOS:000349672900025 %O exported from refbase (https://references.ific.uv.es/refbase/show.php?record=2140), last updated on Thu, 26 Mar 2015 10:30:28 +0000 %X In this paper we explore the effect of delta-ray emission and fluctuations in the signal deposition on the detection of charged particles in silicon-based detectors. We show that these two effects ultimately limit the resolution that can be achieved by interpolation of the signal in finely segmented position-sensitive solid-state devices. %K Charged particle tracking %K silicon detectors %K solid state devices %R 10.1109/TNS.2014.2376941 %U http://arxiv.org/abs/1404.4535 %U https://doi.org/10.1109/TNS.2014.2376941 %P 381-386