@Article{Fernandez_etal2020,
author="Fernandez, A.
and Hufschmidt, D.
and Colaux, J. L.
and Valiente-Dobon, J. J.
and Godinho, V.
and Jimenez de Haro, M. C.
and Feria, D.
and Gadea, A.
and Lucas, S.",
title="Low gas consumption fabrication of He-3 solid targets for nuclear reactions",
journal="Materials {\&} Design",
year="2020",
publisher="Elsevier Sci Ltd",
volume="186",
pages="108337--10pp",
optkeywords="He-3 solid targets; Quasistatic magnetron sputtering; Low gas consumption; Nuclear reactions; Inverse kinematics; Target stability",
abstract="Nanoporous solids that stabilize trapped gas nanobubbles open new possibilities to fabricate solid targets for nuclear reactions. A methodology is described based on the magnetron sputtering (MS) technique operated under quasistatic flux conditions to produce such nanocomposites films with He-3 contents of up to 16 at.{\%} in an amorphous-silicon matrix. In addition to the characteristic low pressure (3-6 Pa) needed for the gas discharge, the method ensures almost complete reduction of the process gas flow during film fabrication. The method could produce similar materials to those obtained under classical dynamic flux conditions for MS. The drastic reduction (>99.5{\%}) of the gas consumption is fundamental for the fabrication of targets with scarce and expensive gases. Si:He-3 and W:He-3 targets are presented together with their microstructural (scanning and transmission electron microscopy, SEM and TEM respectively) and compositional (Ion Beam Analysis, IBA) characterization. The He-3 content achieved was over 1 x 10(18) at/cm(2) for film thicknesses between 1.5 and 3 $\mu$m for both Si and W matrices. First experiments to probe the stability of the targets for nuclear reaction studies in inverse kinematics configurations are presented.",
optnote="WOS:000505221700053",
optnote="exported from refbase (https://references.ific.uv.es/refbase/show.php?record=4239), last updated on Thu, 16 Jan 2020 07:41:56 +0000",
issn="0264-1275",
doi="10.1016/j.matdes.2019.108337",
opturl="https://doi.org/10.1016/j.matdes.2019.108337",
language="English"
}